[11p-P6-1~24] 16 非晶質・微結晶（ポスター）

[11p-P6-11] Research of the process for high quality a-Si:H passivation layer

〇Shota Yamamoto¹, Yuki Okada¹, Hiroyuki Miwa¹, Satoshi Nishida¹, Nobuyuki Matsuki¹, Hiroshi Muta¹, Shizuma Kuribayashi¹ (1.Gifu Univ.)

Keywords:passivation layer