[11p-P6-1~24] 16 非晶質・微結晶（ポスター）

[11p-P6-12] Lifetime improvement of silicon substrate using TMAH with texture

〇Ryohei Terazawa¹, Masato Kanematsu¹, Yoshiki Muto¹, Satoshi Nishida¹, Hiroshi Muta¹, Shizuma Kuribayashi¹ (1.Gifu Univ)

Keywords:lifetime,silicon