[11p-P6-1~24] 16 非晶質・微結晶（ポスター）

[11p-P6-15] Effect of surface passivation by a-Si films on flash-lamp-crystallized poly-Si films

〇Takaki Nozawa¹, Taiki Watanabe¹, Keisuke Ohdaira¹ (1.JAIST)

Keywords:Flash Lamp Annealing,poly-Si