[12a-A16-1~11] 3.15 Silicon photonics

[12a-A16-11] Study on Depletion Type Si Optical Modulator, Using Strained SiGe Layer

〇Junichi Fujikata¹, Masataka Noguchi¹, Younghyun Kim², Shigeki Takahashi¹, Takahiro Nakamura¹, Mitsuru Takenaka² (1.PETRA, 2.Univ. of Tokyo)

Keywords:silicon optical modulator,strained SiGe,silicon photonics