The 62nd JSAP Spring Meeting, 2015

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3 Optics and Photonics » 3.13 Semiconductor optical devices

[12a-A17-1~15] 3.13 Semiconductor optical devices

Thu. Mar 12, 2015 9:00 AM - 1:00 PM A17 (6A-207)

9:00 AM - 9:15 AM

[12a-A17-1] Fabrication of High Density Sub 10 nm Ge Nanodisks and Its Optical Characteristics Using Bio-template and Neutral Beam Etching

〇Takuya Fujii1, 2, Taiga Isoda3, 5, Mohamed-Tahar Chentir1, 4, Hirotaka Endo2, Kohei M. Itoh3, 5, Seiji Samukawa1, 4, 5 (1.Tohoku Univ., 2.Honda R&D, 3.Keio Univ., 4.WPI-AIMR, 5.JST-CREST)

Keywords:quantum dot,solar cell,germanium