The 62nd JSAP Spring Meeting, 2015

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3 Optics and Photonics » 3.13 Semiconductor optical devices

[12a-A17-1~15] 3.13 Semiconductor optical devices

Thu. Mar 12, 2015 9:00 AM - 1:00 PM A17 (6A-207)

11:45 AM - 12:00 PM

▲ [12a-A17-11] Fabrication of SiC Membrane High Contrast Grating Using Nanoimprint Lithography

〇(D)YingYu Lai1, 2, Shunya Inoue1, Tien-Chang Lu2, Shing-Chung Wang2, Fumio Koyama1 (1.TIT, 2.NCTU)

Keywords:High contrast grating,SiC