The 62nd JSAP Spring Meeting, 2015

Presentation information

Oral presentation

13 Semiconductors » 13.8 Compound and power electron devices and process technology

[12a-A21-1~13] 13.8 Compound and power electron devices and process technology

Thu. Mar 12, 2015 9:00 AM - 12:30 PM A21 (6A-213)

11:15 AM - 11:30 AM

[12a-A21-9] Evaluation of 2DEG and polarization in AlGaN/GaN structure using scanning nonlinear dielectric microscopy

〇Kotaro Hirose1, Norimichi Chinone1, Yasuo Cho1 (1.RIEC. Tohoku Univ.)

Keywords:SNDM,HEMT,2DEG