The 62nd JSAP Spring Meeting, 2015

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9 Applied Materials Science » 9.4 Thermoelectric conversion

[12a-A22-1~13] 9.4 Thermoelectric conversion

Thu. Mar 12, 2015 9:00 AM - 12:30 PM A22 (6A-214)

11:15 AM - 11:30 AM

△ [12a-A22-9] Growth and Thermoelectric Properties of Ca-Si Films by Sputtering Method

〇Mutsuo Uehara1, Hiroki Arai1, Shota Ogawa1, Kensuke Akiyama1, 2, Masaaki Matsushima1, Hiroshi Uchida3, Yoshisato Kimura1, Hiroshi Funakubo1 (1.Tokyo Tech., 2.Kanagawa Industrial Technology Center, 3.Sophia Univ.)

Keywords:Thermoelectric Properties,Sputtering,Calcium Silicide