[12a-A23-1~12] 13.6 Semiconductor English Session

▲ [12a-A23-1] Surface potential observation of heavily-doped Si by KPFM

〇(D)Krzysztof Tyszka^{1, 2}, Daniel Moraru¹, Takeshi Mizuno¹, Ryszard Jablonski², Mihicharu Tabe¹ (1.Shizuoka Univ., 2.Warsaw Univ. of Tech.)

キーワード：Kelvin Probe Force Microscope