The 62nd JSAP Spring Meeting, 2015

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Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[12a-A29-1~11] 13.4 Si wafer processing /MEMS/Integration technology

Thu. Mar 12, 2015 9:00 AM - 12:00 PM A29 (6A-204)

9:15 AM - 9:30 AM

[12a-A29-2] Lowering resistivity by BLDA for Si film without de-hydrogenation

〇Tomohide Wakasugi1, Takuya Ashitomi1, Tatsuya Okada1, Takashi Noguchi1, Osamu Nishikata2, Atsushi Ota2, Kazuhisa Inoue3, Kazuo Yamada3 (1.Ryukyus Univ., 2.ULVAC Inc., 3.Products-support Co. Ltd)

Keywords:Lowering resistivity,Crystallinity,Thin film transistor