The 62nd JSAP Spring Meeting, 2015

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[12a-A29-1~11] 13.4 Si wafer processing /MEMS/Integration technology

Thu. Mar 12, 2015 9:00 AM - 12:00 PM A29 (6A-204)

9:30 AM - 9:45 AM

[12a-A29-3] Dependence of Silicon Grain Growth by Micro-Thermal-Plasma-Jet Irradiation on Precursor Films

〇Shohei Hayashi1, 2, Seiji Morisaki1, Shogo Yamamoto1, Taichi Nakatani1, Ryota Shin1, Seiichiro Higashi1 (1.Grad. School of AdSM, Hiroshima Univ., 2.JSPS Research Fellow PD)

Keywords:crystallization,thermal plasma jet,grain growth