The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[12a-A29-1~11] 13.4 Si wafer processing /MEMS/Integration technology

Thu. Mar 12, 2015 9:00 AM - 12:00 PM A29 (6A-204)

9:45 AM - 10:00 AM

[12a-A29-4] In-situ Observation of Grain Growth in a-Si patterns Crystallized by Atmospheric Micro-Thermal-Plasma-Jet

〇(D)Seiji Morisaki1, Shohei Hayashi1, Shogo Yamamoto1, Taichi Nakatani1, Takuya Kasahara1, Seiichiro Higashi1 (1.Grad. School of AdSM, Hiroshima Univ.)

Keywords:TFT,thermal plasma jet,Crystallization