The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[12a-A29-1~11] 13.4 Si wafer processing /MEMS/Integration technology

Thu. Mar 12, 2015 9:00 AM - 12:00 PM A29 (6A-204)

10:00 AM - 10:15 AM

[12a-A29-5] Formation of orientation-controlled large-grain Ge-rich SiGe on insulator by gold-induced layer-exchange low-temperature crystallization (≤300°C)

〇Taizoh Sadoh1, Jonghyeok Park1, 2, Rikuta Aoki1, Masanobu Miyao1 (1.Kyushu Univ., 2.JSPS)

Keywords:semiconductor