The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[12a-A29-1~11] 13.4 Si wafer processing /MEMS/Integration technology

Thu. Mar 12, 2015 9:00 AM - 12:00 PM A29 (6A-204)

10:45 AM - 11:00 AM

[12a-A29-7] Application of amorphous C12A7 electride to TFT electrodes

〇Yasuhisa Oana1, Toshinari Watanabe2, Toda Yoshitake3, Naomichi Miyakawa2, Kaoru Furuta1, Hideya Kumomi3, Hideo Hosono3 (1.LG Display, 2.Asahi Glass, 3.TITech)

Keywords:electride,TFT,electrode