[12a-B4-1~10] 15.6 Group IV Compound Semiconductors

[12a-B4-4] Periodic distance of surface nanostructures on 4H-SiC(0001) with various off-angles

〇Kouhei Fukuma¹, Tomoya Takasaki¹, Takashi Kajiwara¹, Anton Visikovskiy¹, Satoru Tanaka¹ (1.Kyushu University)

Keywords:silicon carbide,nanofacet