The 62nd JSAP Spring Meeting, 2015

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Joint Session K » Joint Session K

[12a-D1-1~12] Joint Session K

Thu. Mar 12, 2015 9:00 AM - 12:15 PM D1 (16-101)

9:00 AM - 9:15 AM

[12a-D1-1] ZnO films formed by high-speed rotation-type mist-CVD method

〇HIRONOBU TANOUE1, Wada Shohei1, Yokoyama Yutaro1, Taniguchi Takuya1, Yamamoto Shinya1, Nakamura Shohei1, Naka Yoshihiro1, 3, Nagaoka Shoji2, 3, Nakamura Yusui1, 3 (1.Kumamoto Univ., 2.Kumamoto Industrial Research Institute, 3.Phoenics)

Keywords:Zinc Oxide,mist CVD