[12a-D1-1~12] Joint Session K

△ [12a-D1-10] Helicon-Wave-Excited-Plasma Sputtering Epitaxy of ZnO films using the hydrothermal ZnO target (4) : about transition metal impurities

〇(B)Sakuya Iwahashi¹, Yoshiki Yamazaki¹, Kazunobu Kojima¹, Kentaro Furusawa¹, Akira Uedono², Shigefusa Chichibu¹ (1.IMRAM-Tohoku Univ., 2.Univ. Tsukuba)

Keywords:ZnO,transition metals