The 62nd JSAP Spring Meeting, 2015

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Oral presentation

Joint Session K » Joint Session K

[12a-D1-1~12] Joint Session K

Thu. Mar 12, 2015 9:00 AM - 12:15 PM D1 (16-101)

10:45 AM - 11:00 AM

[12a-D1-7] Air annealing treatment of ZnO layer grown by UHV sputtering

〇(M1)Kenji Matsuhisa1, Hiroki Sakuma1, Yuya Miyoshi1, Ai Mizuno1, Hiroyuki Shinoda1, Nobuki Mutsukura1 (1.Tokyo Denki Univ.)

Keywords:ZnO,oxide semiconductor,sputtering