The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[12a-D8-1~10] 6.4 Thin films and New materials

Thu. Mar 12, 2015 9:00 AM - 11:45 AM D8 (16-303)

9:00 AM - 9:15 AM

[12a-D8-1] Annealing temperature dependency of the film composition of Sr2SiO4 thin film produced by the taget Sr2SiO4

〇(M1)Keiji Imanishi1, Shota Taniwaki1, Mitsuhiro Umano1, Yasushi Hotta1, 3, Haruhiko Yoshida1, 3, Koji Arafune1, 3, Atsushi Ogura2, 3, Shin-ichi Satoh1, 3 (1.Univ.of Hyogo, 2.Meiji Univ., 3.JST-CREST)

Keywords:strontium silicate