The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[12a-D8-1~10] 6.4 Thin films and New materials

Thu. Mar 12, 2015 9:00 AM - 11:45 AM D8 (16-303)

9:15 AM - 9:30 AM

[12a-D8-2] Fabrication of tricolor superstructures of two High-k materials and SiOx

〇Shozo Miyake1, Yuki Toyoshima1, Satoshi Ueoka1, Yasushi Hotta1, 3, Haruhiko Yoshida1, 3, Koji Arafune1, 3, Atsushi Ogura2, 3, Shin-ichi Satoh1, 3 (1.Univ. of Hyogo, 2.Meiji Univ., 3.JST-CREST)

Keywords:high-k