[12a-P13-1~11] 13.5 Semiconductor devices and related techologies

[12a-P13-2] Analysis of PBTI Degradation for n-type Tunnel FinFETs

〇Wataru Mizubayashi¹, Takahiro Mori¹, Koichi Fukuda¹, Yongxun Liu¹, Takashi Matsukawa¹, Yuki Ishikawa¹, Kazuhiko Endo¹, Shinichi Ouchi¹, Junichi Tsukada¹, Hiromi Yamauchi¹, Shinji Migita¹, Yukinori Morita¹, Hiroyuki Ota¹, Meishoku Masahara¹ (1.AIST)

Keywords:reliability,tunnel FET