The 62nd JSAP Spring Meeting, 2015

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Poster presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[12a-P8-1~1] 7.3 Micro/Nano patterning and fabrication

Thu. Mar 12, 2015 9:30 AM - 11:30 AM P8 (Gymnasium)

9:30 AM - 11:30 AM

[12a-P8-1] A Molecular Simulation of Electron Beam Lithography (3)

〇Sho Hitomi1, Katsushi Michishita1, Masaaki Yasuda1, Hiroaki Kawata1, Yoshihiko Hirai1 (1.Osaka Pref. Univ.)

Keywords:electron beam lithography,molecular dynamics,Monte Carlo simulation