5:45 PM - 6:00 PM
[12p-A11-17] Measurement of Work Function of Hafnium Nitride Films Treated by Ar Plasma
Keywords:hafnium nitride,work function,plasma treatment
Presentation information
Oral presentation
7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams
[12p-A11-1~21] 7.2 Applications and technologies of electron beams
Thu. Mar 12, 2015 1:30 PM - 7:00 PM A11 (6A-116)