The 62nd JSAP Spring Meeting, 2015

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[12p-A11-1~21] 7.2 Applications and technologies of electron beams

Thu. Mar 12, 2015 1:30 PM - 7:00 PM A11 (6A-116)

5:45 PM - 6:00 PM

[12p-A11-17] Measurement of Work Function of Hafnium Nitride Films Treated by Ar Plasma

Sho Fujiwara1, Hiroshi Tsuji1, 〇Yasuhito Gotoh1 (1.Kyoto Univ.)

Keywords:hafnium nitride,work function,plasma treatment