The 62nd JSAP Spring Meeting, 2015

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[12p-A11-1~21] 7.2 Applications and technologies of electron beams

Thu. Mar 12, 2015 1:30 PM - 7:00 PM A11 (6A-116)

6:30 PM - 6:45 PM

[12p-A11-20] FIM/FEM Observation of Tungsten Emitter Processed in Ethanol

〇Noriaki Nyuba1, Hiroshi Tsuji1, Yasuhito Gotoh1 (1.Kyoto Univ.)

Keywords:FIM,FEM