The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[12p-A11-1~21] 7.2 Applications and technologies of electron beams

Thu. Mar 12, 2015 1:30 PM - 7:00 PM A11 (6A-116)

2:45 PM - 3:00 PM

[12p-A11-6] Dependence of charging of insulator film by electron beam irradiation on the bias-voltage

〇Yuki Handa1, Masashi Toukai1, Masatoshi Kotera1 (1.Osaka Inst.)

Keywords:Scaning Electron Microscope