[12p-A16-1~13] 3.15 Silicon photonics

[12p-A16-10] Integration of InP-based buried heterostructure on Si-wire

〇Takuro Fujii^{1, 2}, Koji Takeda^{1, 2}, Hidetaka Nishi^{1, 2}, Koichi Hasebe^{1, 2}, Takaaki Kakitsuka^{1, 2}, Tsuyoshi Yamamoto¹, Koji Yamada^{1, 2}, Shinji Matsuo^{1, 2} (1.NTT Device Technology Labs., 2.Nanophotonics Center)

Keywords:epitaxial growth,wafer bonding,silicon photonics