The 62nd JSAP Spring Meeting, 2015

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Oral presentation

3 Optics and Photonics » 3.15 Silicon photonics

[12p-A16-1~13] 3.15 Silicon photonics

Thu. Mar 12, 2015 2:00 PM - 5:30 PM A16 (6A-206)

3:15 PM - 3:30 PM

▲ [12p-A16-6] Study of Thermal Annealing Effect on Smartcut Ge-on-Insulator Substrate

〇Jian Kang1, 2, Xiao Yu1, 2, Mitsuru Takenaka1, 2, Shinichi Takagi1, 2 (1.Tokyo Univ., 2.JST-CREST)

Keywords:GOI,annealing,Smartcut