[12p-A16-1~13] 3.15 シリコンフォトニクス

▲ [12p-A16-6] Study of Thermal Annealing Effect on Smartcut Ge-on-Insulator Substrate

〇Jian Kang^{1, 2}, Xiao Yu^{1, 2}, Mitsuru Takenaka^{1, 2}, Shinichi Takagi^{1, 2} (1.Tokyo Univ., 2.JST-CREST)

キーワード：GOI,annealing,Smartcut