[12p-A23-1~11] 13.5 Semiconductor devices and related techologies

[12p-A23-2] Channel Shape Dependent of Electrical Characteristics of Floating-Gate Type 3D FinFET Flash Memories

〇Yongxun Liu¹, Toshihide Nabatame², Takashi Matsukawa¹, Kazuhiko Endo¹, Shinichi O'uchi¹, Junichi Tsukada¹, Hiromi Yamauchi¹, Yuki Ishikawa¹, Wataru Mizubayashi¹, Yukinori Morita¹, Shinji Migita¹, Hiroyuki Ota¹, Toyohiro Chikyow², Meishoku Masahara¹ (1.AIST, 2.NIMS)

Keywords:Flash memory