[12p-A25-1~11] 13.9 Optical properties and light-emitting devices

[12p-A25-7] Fabrication of GaAs Quantum Nanodisk LED by Combination of Bio-template and Neutral Beam Etching

〇Akio Higo¹, Takayaki Kiba^{2, 7}, Cedric Thomas³, Yunpeng Wang⁴, Ichiro Yamashita^{5, 7}, Masakazu Sugiayma⁶, Yoshiaki Nakano⁶, Akihiro Murayama^{2, 7}, Seiji Samukawa^{1, 3, 7} (1.WPI-AIMR, Tohoku Univ., 2.IST, Hokkaido Univ., 3.IFS, Tohoku Univ., 4.RCAST, the Univ. of Tokyo, 5.NAIST, 6.School of Eng., the Univ. of Tokyo, 7.JST-CREST)

Keywords:GaAs,light emitting diode,quantum nanodisk structure