[12p-A29-1~11] How should we behave as future scientists? - Innovative value creation of integration technology by young generations -

[12p-A29-8] Effects of CTE mismatch between different materials on transistor performance in 3D integration

〇Hisashi Kino¹, Shunsuke Ikegaya², Mitsumasa Koyanagi³, Tetsu Tanaka⁴ (1.FRIS Tohoku Univ., 2.School of Engineering, Tohoku Univ., 3.NICHe Tohoku Univ., 4.Graduate School of Biomedical Engineering, Tohoku Univ.)

Keywords:Integration technology