[12p-A3-1~11] 11.4 Analog applications and their related technologies

[12p-A3-5] Deep Etched structures on a silicon substrate for high-sensitivity gamma-ray detectors

〇noiaki miyamoto¹, masato naruse¹, taino tohru¹, myoren hiroaki¹ (1.Saitama Univ.)

Keywords:superconducting detector,kinetic inductance detector