[12p-A3-1~11] 11.4 Analog applications and their related technologies

[12p-A3-8] Fabrication of Microwave Kinetic Inductance Detectors using TaN Thin Films

〇Hironobu Yamada¹, Yuhei Ogawa¹, Daiki Oka¹, Atsushi Saito¹, Shigetoshi Ohshima¹, Seiichiro Ariyoshi², Kensuke Nakajima¹ (1.Yamagata Univ., 2.Toyohashi Univ. of Tech.)

Keywords:terahertz wave detector