[12p-B1-1~23] 15.4 III-V-group nitride crystals

[12p-B1-23] Improvement in the DUV luminescence of hexagonal boron nitride films grown by low-pressure CVD

〇Naoki Umehara¹, Atsushi Masuda¹, Takaki Shimizu², Tetsuya Kouno¹, Hiroko Kominami¹, Kazuhiko Hara^{3, 4} (1.Graduate school of Eng., Shizuoka Univ., 2.Faculty of Eng., Shizuoka Univ., 3.Graduate school of Sci. and Tech., Shizuoka Univ., 4.Res. Inst. of Electronics, Shizuoka Univ.)

Keywords:hexagonal boron nitride,CVD,thin films