The 62nd JSAP Spring Meeting, 2015

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Symposium » Progress of power semiconductors, toward wide band-gap materials beyond silicon

[12p-B4-1~10] Progress of power semiconductors, toward wide band-gap materials beyond silicon

Thu. Mar 12, 2015 1:15 PM - 6:15 PM B4 (6B-104)

4:45 PM - 5:15 PM

[12p-B4-8] Present status of ion implantation tecnlogy to power device fabrication process

〇Tetsu Kachi1 (1.Toyota CRDL)

Keywords:ion implantation,activation,power device