The 62nd JSAP Spring Meeting, 2015

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Symposium » Guidelines for Development of Ferroelectric Materials in the Following Generation

[12p-B5-1~8] Guidelines for Development of Ferroelectric Materials in the Following Generation

Thu. Mar 12, 2015 1:30 PM - 5:30 PM B5 (6B-105)

3:00 PM - 3:30 PM

[12p-B5-4] Application of ferroelectric thin films to piezoelectric MEMS

〇Takeshi Kobayashi1, Natsumi Makimoto1, Hironao Okada1, Seiichi Takamatsu1, Yasuhiro Suzuki1, Toshihiro Itoh1, Ryutaro Maeda1 (1.AIST)

Keywords:PZT,MEMS