The 62nd JSAP Spring Meeting, 2015

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Symposium » Advanced and Practical 3D Fabrication Techniques Using Lasers

[12p-B6-1~9] Advanced and Practical 3D Fabrication Techniques Using Lasers

Thu. Mar 12, 2015 1:30 PM - 6:00 PM B6 (6B-106)

5:30 PM - 5:45 PM

[12p-B6-8] Through holes formation in multi component glass substrates by laser-assisted etching

〇MASATOSHI YONEMURA1, SATORU KATO1, KAZUO HASEGAWA1, HIDETOMO TAKAHASHI2 (1.TCRDL, 2.Aisin Seiki)

Keywords:laser-assisted etching,femtosecond laser,glass