The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.5 Surface Physics, Vacuum

[12p-D13-1~14] 6.5 Surface Physics, Vacuum

Thu. Mar 12, 2015 1:15 PM - 5:00 PM D13 (16-502)

4:45 PM - 5:00 PM

[12p-D13-14] Analysis of the oxidation mechanism of Si(113) surfaces

〇Kazuma Tanaka1, Shin-ya Ohno1, Hiraku Kodama1, Akitaka Yoshigoe2, Yuden Teraoka2, Masatoshi Tanaka1 (1.Yokohama Nat'l Univ., 2.Japan Atomic Energy Agency)

Keywords:surface oxidation,photoelectron spectroscopy,silicon