The 62nd JSAP Spring Meeting, 2015

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Symposium » Sensing Technologies for the Future of Automobile Society～The Prospect and Challenge of Autonomous Driving System～

[12p-D15-1~8] Sensing Technologies for the Future of Automobile Society～The Prospect and Challenge of Autonomous Driving System～

Thu. Mar 12, 2015 2:00 PM - 5:15 PM D15 (16-504)

3:00 PM - 3:15 PM

△ [12p-D15-3] A Study on Sub-1G-to-20G Integrated MEMS Accelerometer

〇Daisuke Yamane1, 4, Toshifumi Konishi2, Takaaki Matsushima2, Hiroshi Toshiyoshi3, 4, Katsuyuki Machida1, 2, 4, Kazuya Masu1, 4 (1.Tokyo Tech, 2.NTT-AT Corp., 3.The Univ. of Tokyo, 4.JST-CREST)

Keywords:accelerometer,MEMS