The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[12p-D8-1~19] 6.4 Thin films and New materials

Thu. Mar 12, 2015 1:15 PM - 6:30 PM D8 (16-303)

5:30 PM - 5:45 PM

[12p-D8-16] Fabrication of transmissive copper thin films by mist chemical vapor deposition method

〇masaki ueno1, Takumi Ikenoue1, Masao Miyake1, Tetsuji Hirato1 (1.Kyoto Univ.)

Keywords:copper thin films,mist chemical vapor deposition method,transmissive