[12p-D8-1~19] 6.4 Thin films and New materials

▲ [12p-D8-2] Nanoscale measurements of the work function in nanocrystalline TiN and amorphous films by multimode scanning probe microscopy and spectroscopy

〇Leonid Bolotov¹, Takashi Matsukawa¹, Koichi Fukuda¹, Meishoku Masahara¹, Tetsuya Tada¹ (1.AIST)

Keywords:work function,scanning tunneling spectroscopy,nitride