[12p-D8-1~19] 6.4 薄膜新材料

▲ [12p-D8-3] Measurements of absolute densities of Cu, Zn, Sn and S atoms in magnetron sputtering plasma employing a Cu₂ZnSnS₄ target

〇Nayan Nafarizal^{1, 2}, Koichi Sasaki¹ (1.Hokkaido Univ., 2.Univ. Tun Hussein Onn Malaysia)

キーワード：CZTS,Magnetron Sputtering,Absorption Spectroscopy