The 62nd JSAP Spring Meeting, 2015

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Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.1 Interdisciplinary and General Physics

[12p-P1-1~5] 1.1 Interdisciplinary and General Physics

Thu. Mar 12, 2015 1:30 PM - 3:30 PM P1 (Gymnasium)

1:30 PM - 3:30 PM

[12p-P1-4] ta-C film damage of deep ultraviolet irradiation in Argon atmosphere

〇TOMOMI KOZU1, 2, MAKOTO YAMAGUCHI3, MASAHIRO KAWAGUCHI4, KEN NISHIDA2 (1.Renishaw KK, 2.N.D.A, 3.Akita univ., 4.TIRI)

Keywords:Raman spectroscopy,Diamond like carbon,deep ultraviolet