The 62nd JSAP Spring Meeting, 2015

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Poster presentation

8 Plasma Electronics » 8.3 deposition of thin film and surface treatment

[12p-P10-1~8] 8.3 deposition of thin film and surface treatment

Thu. Mar 12, 2015 4:00 PM - 6:00 PM P10 (Gymnasium)

4:00 PM - 6:00 PM

[12p-P10-8] Fabrication of a-TiNX thin films by plasma-enhanced atomic layer deposition at low temperature

〇ByeongHak Yoo1, Keita Seki1, Tetsu Sato1 (1.Univ. of Yamanashi)

Keywords:plasma,semiconductor