[12p-P15-1~5] 15.2 II-VI and related compounds

[12p-P15-3] Hydrogen behavior of H-ion implanted ZnO bulk single crystals:Evaluation by elastic recoil detection analysis

〇(B)NAOKI NISHIKATA¹, KAIDA TAKUYA¹, KAMIOKA KAZUMA¹, NISHIMURA TOMOAKI¹, KURIYAMA KAZUO¹, KUSHIDA KAZUMASA² (1.Hosei Univ., 2.Oosaka kyouiku Univ.)

Keywords:ZnO,H-ion