The 62nd JSAP Spring Meeting, 2015

Presentation information

Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.3 Novel technologies and interdisciplinary engineering

[12p-P2-1~11] 1.3 Novel technologies and interdisciplinary engineering

Thu. Mar 12, 2015 1:30 PM - 3:30 PM P2 (Gymnasium)

1:30 PM - 3:30 PM

[12p-P2-5] EDX analysis on sidewall surface of Si etched by Deep-RIE Process

〇Mina Sato1, Kunio Nishioka1, Dai Shoji1, Akihiro Matsutani1 (1.Semiconductor and MEMS Processing Center, Tokyo Tech)

Keywords:Deep-RIE