The 62nd JSAP Spring Meeting, 2015

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Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.5 Resources and environment

[12p-P3-1~3] 1.5 Resources and environment

Thu. Mar 12, 2015 1:30 PM - 3:30 PM P3 (Gymnasium)

1:30 PM - 3:30 PM

[12p-P3-2] Clean Unit System Platform (CUSP) ~ a versatile clean platform for device processes as well as for living environment

〇Akira Ishibashi1, 2, Yoshihisa Ohashi2 (1.RIES, Hokudai, 2.C'sTEC Corp.)

Keywords:Clean Environment,Cleanliness