[12p-P3-1~3] 1.5 Resources and environment

[12p-P3-3] Development of ozone sensing instrument using the deep ultraviolet light-emitting diode

〇Hirotaka Nakamura¹, Yuji Takeda¹, Hiroyasu Sugano², Yumi Ahiko², Yoshinobu Aoyagi³ (1.Tokyo Metropolitan Industrial Technology Research Inst., 2.Hikari-Tech, 3.Ritsumeikan Univ.)

Keywords:ozone gas,Deep Ultraviolet Light-Emitting Diode(DUV-LED),ozone concentration measurement