[12p-P9-1~5] 8.1 Plasma production and control

[12p-P9-3] Simulation of Plasma Behavior in AP Microwave Line Plasma

〇Haruka Suzuki¹, Suguru Nakano¹, Hitoshi Itoh^{2, 3}, Makoto Sekine^{1, 2}, Masaru Hori^{1, 2}, Hirotaka Toyoda^{1, 2} (1.Nagoya Univ., 2.PLANT, Nagoya Univ., 3.Tokyo Electron Ltd.)

Keywords:plasma,atmospheric pressure